Dr. Lin Zschiedrich
at JCMwave GmbH
SPIE Involvement:
Author
Publications (49)

PROCEEDINGS ARTICLE | May 28, 2018
Proc. SPIE. 10694, Computational Optics II
KEYWORDS: Optical design, Metrology, Diffractive optical elements, Silicon, Scatterometry, Inverse problems, Finite element methods, Optimization (mathematics), Stochastic processes, Inverse optics

PROCEEDINGS ARTICLE | May 9, 2018
Proc. SPIE. 10682, Semiconductor Lasers and Laser Dynamics VIII
KEYWORDS: Oxides, Computer simulations, 3D modeling, Finite element methods, Vertical cavity surface emitting lasers, Near field optics, Maxwell's equations

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Oxides, Metrology, Polarization, Scattering, Silicon, Light scattering, Scatterometry, Uncertainty analysis, Optical metrology, Inverse problems, Finite element methods, Computational lithography, Critical dimension metrology, Nanolithography, Inverse optics, Nano optics, Maxwell's equations

PROCEEDINGS ARTICLE | February 16, 2017
Proc. SPIE. 10124, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XXI
KEYWORDS: Semiconductors, Oxides, Refractive index, Multilayers, Light sources, Quantum wells, Light emitting diodes, Etching, Dielectrics, Photonic crystals, Distributed Bragg reflectors, Diodes, Vertical cavity surface emitting lasers, Light

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Polarization, Scattering, Silicon, Light scattering, Computing systems, Computer simulations, Scatterometry, Numerical analysis, Optical metrology, 3D metrology, Finite element methods, Computational lithography, Electromagnetism, Maxwell's equations

PROCEEDINGS ARTICLE | September 23, 2015
Proc. SPIE. 9630, Optical Systems Design 2015: Computational Optics
KEYWORDS: Optical components, Optical design, Visualization, Interfaces, Finite element methods, 3D equipment, Transparent conductors, Electromagnetism, Absorption, Maxwell's equations

Showing 5 of 49 publications
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