Dr. Lin Zschiedrich
at JCMwave GmbH
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 2 August 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Optimization (mathematics), Computer simulations, Inverse optics, Finite element methods, Stochastic processes, Scatterometry, Scattering, Inverse problems, Reconstruction algorithms, Scatter measurement

Proceedings Article | 28 May 2018
Proc. SPIE. 10694, Computational Optics II
KEYWORDS: Inverse problems, Finite element methods, Optimization (mathematics), Silicon, Metrology, Inverse optics, Stochastic processes, Optical design, Diffractive optical elements, Scatterometry

Proceedings Article | 9 May 2018
Proc. SPIE. 10682, Semiconductor Lasers and Laser Dynamics VIII
KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Finite element methods, Computer simulations, Near field optics, Maxwell's equations, 3D modeling

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Metrology, Optical metrology, Maxwell's equations, Light scattering, Computational lithography, Nanolithography, Finite element methods, Nano optics, Critical dimension metrology, Scattering, Uncertainty analysis, Inverse optics, Scatterometry, Silicon, Inverse problems, Oxides, Polarization

Showing 5 of 51 publications
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