Dr. Lina Shen
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | October 20, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Polarization, Lithography, Photomasks, Imaging systems, Diffraction, Lithographic illumination, Computer simulations, Image analysis, Zernike polynomials, Image processing

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Diffraction, Polarization, Imaging systems, Matrices, Amplifiers, Image analysis, Zernike polynomials, Photomasks, Received signal strength

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