Lina Zhao
at CIOMP
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 7 February 2006
Proc. SPIE. 6032, ICO20: MEMS, MOEMS, and NEMS
KEYWORDS: Packaging, Mirrors, Switches, Etching, Silicon, Collimators, Microopto electromechanical systems, Optical switching, Optics manufacturing, Anisotropic etching

Proceedings Article | 26 January 2006
Proc. SPIE. 6030, ICO20: Display Devices and Systems
KEYWORDS: Gold, Light emitting diodes, Aluminium gallium indium phosphide, Cladding, Etching, Electrodes, Metals, Gallium arsenide, Photomasks, Wet etching

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