Dr. Linard N. Karklin
SPIE Involvement:
Author
Publications (39)

Proceedings Article | 30 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Error analysis, Silicon, Manufacturing, Design for manufacturing, Optimization (mathematics), Optics manufacturing, Electronic design automation, Model-based design, Design for manufacturability

SPIE Journal Paper | 1 July 2007
JM3 Vol. 6 Issue 03
KEYWORDS: Computer aided design, Optical proximity correction, Critical dimension metrology, Design for manufacturing, Field effect transistors, Manufacturing, Photomasks, Lithography, Analog electronics, Etching

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Manufacturing, Reliability, Design for manufacturing, Photomasks, Optical proximity correction, Computer aided design, Semiconducting wafers, Yield improvement, Electronic design automation, Design for manufacturability

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Silicon, Manufacturing, Computer simulations, Design for manufacturing, Photomasks, Optical proximity correction, Process modeling, Device simulation, Design for manufacturability

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Electron beam lithography, Metals, Manufacturing, Computer simulations, Design for manufacturing, Photomasks, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Electronic design automation

Showing 5 of 39 publications
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