Potentially low loss lithium ion-exchanged glass waveguides were fabricated in various types of silicate glass substrates and characterized by a number of analytical as well as optical methods. The migration of lithium ions was studied in details using the NDP method. The small radius of the Li+ and its high mobility resulted in high strain in the exchanged region causing thus heavily surface damage of the samples. Two crucial points of the matter were solved: to avoid the surface damage the fabrication temperatures must be above the transformation point of used glass (Tg), and to fabricate few-modes waveguides the highly Li-diluted reaction melts must be used.
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