Dr. Linda C. Towidjaja
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Metrology, Optical properties, Etching, Metals, Dielectrics, Atomic force microscopy, Scatterometry, Critical dimension metrology, Semiconducting wafers, Back end of line

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