Dr. Linfei Gao
at Kla China
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Photovoltaics, 3D acquisition, Scanning electron microscopy, Optimization (mathematics), Semiconducting wafers, Overlay metrology, Imaging metrology, 3D image processing

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scatterometry, Process control, Overlay metrology

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