Dr. Ling Yin
Associate Professor at Univ of Adelaide
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 December 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Polishing, Silicon carbide, Surface finishing, Surface roughness, Crystals, Photomicroscopy, Diamond, Silicon, Interferometry, Error analysis

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