Dr. Lingling Pu
at HMI
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Scanning electron microscopy, Image quality, Image enhancement, Semiconducting wafers, Logic, Semiconductors, Medical imaging, Lithography, Denoising, Aerospace engineering

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Scanning electron microscopy, Image processing, Machine learning, Inspection, Data modeling, Semiconductor manufacturing, Image enhancement, Image classification

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Machine learning, Scanning electron microscopy, Image enhancement, Image quality, Semiconducting wafers, Inspection, Image processing, Computer simulations, Wafer inspection

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scanning electron microscopy, Metrology, Critical dimension metrology, Computer simulations, Imaging systems, Image quality, Monte Carlo methods, Detection and tracking algorithms, Model-based design, Image analysis

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scanning electron microscopy, Line edge roughness, Semiconducting wafers, Monte Carlo methods, Image segmentation, Semiconductors, Extreme ultraviolet, Optical simulations, Solids, Metrology

Showing 5 of 7 publications
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