Lingyun Xie
at Tsinghua Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2004
Proc. SPIE. 5280, Materials, Active Devices, and Optical Amplifiers
KEYWORDS: Lithography, Finite-difference time-domain method, Deep ultraviolet, Waveguides, Etching, Dielectrics, Silicon, Photonic crystals, Photonic crystal devices, Light wave propagation

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