Dr. Linmiao Zhang
Distinguished Member of Technical Staff at Micron Semiconductor Asia Ops Pte Ltd
SPIE Involvement:
Publications (3)

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113251O (2020) https://doi.org/10.1117/12.2552823
KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Feedback control, Optical parametric oscillators, Control systems, High volume manufacturing, Data processing, Metrology, Optical lithography

Proceedings Article | 13 March 2018 Paper
Hakki Ergun Cekli, Jelle Nije, Alexander Ypma, Vahid Bastani, Dag Sonntag, Henk Niesing, Linmiao Zhang, Zakir Ullah, Venky Subramony, Ravin Somasundaram, William Susanto, Masazumi Matsunobu, Jeff Johnson, Cyrus Tabery, Chenxi Lin, Yi Zou
Proceedings Volume 10585, 105851N (2018) https://doi.org/10.1117/12.2297304
KEYWORDS: Pattern recognition, Fingerprint recognition, Semiconducting wafers, Scanners, Metrology, Overlay metrology, Optical lithography, Lithography, Manufacturing, Optical parametric oscillators, Process control, Principal component analysis

Proceedings Article | 28 March 2017 Presentation + Paper
Proceedings Volume 10145, 101450V (2017) https://doi.org/10.1117/12.2258039
KEYWORDS: Semiconducting wafers, Metrology, Lithography, Overlay metrology, Analytics, Process control, Optical lithography, Semiconductors, Optical alignment, Contamination, Sensors, Neural networks, Data modeling

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