Dr. Linus Jang
Member of Technical Staff at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Manufacturing, Reflectivity, Photoresist materials, Double patterning technology, Semiconducting wafers, System on a chip

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Metals, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Double patterning technology, Line edge roughness

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Oxides, Etching, Scanning electron microscopy, Frequency modulation, Fermium, Double patterning technology, Chemical reactions, Critical dimension metrology, Photoresist processing, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top