Dr. Linyong Pang
Chief Executive Officer and EVP at D2S Inc
SPIE Involvement:
Author
Websites:
Publications (75)

Proceedings Article | 21 September 2020 Presentation
Proc. SPIE. 11518, Photomask Technology 2020

Proceedings Article | 31 March 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Lithography, Photomasks, Extreme ultraviolet, Optical proximity correction, SRAF, Mask making, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 25 March 2020 Presentation
Proc. SPIE. 11327, Optical Microlithography XXXIII

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Diffraction, Optical lithography, Printing, Near field, Ray tracing, Neural networks, Photomasks, Optical simulations, Optical proximity correction, 3D image processing

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Manufacturing, Photomasks, Computational lithography, Optical proximity correction, Semiconducting wafers, Design for manufacturability

Showing 5 of 75 publications
Conference Committee Involvement (4)
Photomask Technology 2015
29 September 2015 | Monterey, California, United States
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
11 September 2012 | Monterey, California, United States
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