Lionel Riviere Cazaux
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Logic, Optical lithography, Metals, Manufacturing, Reliability, Electronic design automation, New and emerging technologies

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Semiconductors, Metals, Manufacturing, Reliability, Design for manufacturing, Optical proximity correction, Semiconducting wafers, Yield improvement, System on a chip, Electronic design automation

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Lithography, Logic, Silicon, Reliability, Design for manufacturing, Photomasks, Transistors, Field effect transistors, Optimization (mathematics), Tolerancing

Proceedings Article | 5 May 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Semiconductors, Lithography, Reticles, Optical lithography, Data modeling, Optical proximity correction, Semiconducting wafers, Systems modeling, Model-based design, Resolution enhancement technologies

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top