Dr. Lior Neeman
at Nova Measuring Instruments Inc.
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 27 January 2022 Open Access
JM3, Vol. 21, Issue 02, 021203, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021203
KEYWORDS: Silicon, Germanium, Raman spectroscopy, Optical lithography, Manufacturing, Semiconducting wafers, Polarization, Metrology, Raman scattering, Phonons

Proceedings Article | 25 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111T (2021) https://doi.org/10.1117/12.2582181
KEYWORDS: Raman spectroscopy, Manufacturing, Metrology, Optical lithography, X-ray diffraction, Silicon, Nondestructive evaluation, Germanium, Diffraction, Transistors

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