Ms. Lior Sarig Profile

Lior Sarig

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Publications (2)

Proceedings Article | 25 June 2020 Presentation + Paper

Accuracy assessment between on-product and on-optical-target overlay metrology with SEM and STEM

Guy Levin, Lior Sarig, Shimon Levi, Ofer Adan, Ashley Tilson, Jason Arjavac, Michael Strauss, Laurens Kwakman, Philippe Leray, Sandip Halder, Yaniv Abramovitz

Proceedings Volume 11325, 1132508 (2020) https://doi.org/10.1117/12.2563606

KEYWORDS: Overlay metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Wafer-level optics, Semiconducting wafers, Line edge roughness, Photomasks, Transmission electron microscopy, Dysprosium, Metrology

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Proceedings Article | 24 March 2020 Presentation + Paper

Accelerating on-device overlay metrology accuracy verification

Yaniv Abramovitz, Lior Sarig, Guy Levin, Shimon Levi, Ron Davidescu, Daniel Harel, Ofer Adan, Philippe Leray, Sandip Halder

Proceedings Volume 11325, 1132515 (2020) https://doi.org/10.1117/12.2568682

KEYWORDS: Overlay metrology, Semiconducting wafers, Scanning electron microscopy, Photomasks, Metrology, Wafer-level optics, Etching, Transmission electron microscopy

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