Dr. Liping Zhang
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Optical lithography, Fin field effect transistors, Etching, Dry etching, Gallium arsenide, Silicon, Field effect transistors, Plasma etching, Front end of line, Nanowires

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