Lisa R. Rich
at Hitchings Consulting
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Monochromatic aberrations, Reticles, Birefringence, Error analysis, Manufacturing, Wavefronts, Optical alignment, Phase measurement, Optics manufacturing

PROCEEDINGS ARTICLE | July 30, 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Wafer-level optics, Optical components, Lithography, Mirrors, Reticles, Contamination, Objectives, Semiconducting wafers, Failure analysis, Fiber optic illuminators

PROCEEDINGS ARTICLE | July 30, 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Polarization, Birefringence, Interferometers, Interferometry, Wavefronts, Polarizers, Oxygen, Spatial coherence, Phase measurement

PROCEEDINGS ARTICLE | March 6, 2001
Proc. SPIE. 4198, Optomechanical Engineering 2000
KEYWORDS: Actuators, Mirrors, Error analysis, Composites, Control systems, Optical fabrication, Space mirrors, Computer aided design, Space based lasers, Solid modeling

PROCEEDINGS ARTICLE | October 23, 1995
Proc. SPIE. 2543, Silicon Carbide Materials for Optics and Precision Structures
KEYWORDS: Thermography, Mirrors, Polishing, Ions, Silicon, Coating, Surface roughness, Distortion, Silicon carbide, Surface finishing

Conference Committee Involvement (2)
Optical Manufacturing and Testing VI
31 July 2005 | San Diego, California, United States
Optical Manufacturing and Testing V
3 August 2003 | San Diego, California, United States
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