Dr. Lituo Liu
at Institute of Microelectronics, Chinese Academy of Sciences
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Spectroscopy, Particles, Copper, Silicon, Laser applications, Semiconducting wafers, Pulsed laser operation, Laser systems engineering

Proceedings Article | 15 October 2012
Proc. SPIE. 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Sensors, Calibration, Metals, Spectroscopy, Laser induced breakdown spectroscopy, YAG lasers, Chemical elements, Neodymium, Signal detection, Lead

Proceedings Article | 5 December 2011
Proc. SPIE. 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
KEYWORDS: Soil science, Metals, Spectroscopy, Nd:YAG lasers, Fiber lasers, Signal processing, Laser induced breakdown spectroscopy, Laser spectroscopy, Optimization (mathematics), Pulsed laser operation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top