Dr. Liu He
at Brewer Science Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Etching, Polymers, Coating, Reflectivity, Chromophores, Photoresist materials, Absorbance, Prototyping, Bottom antireflective coatings

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Refractive index, Etching, Polymers, Silicon, Coating, Reflectivity, Photoresist processing, Prototyping, Bottom antireflective coatings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top