Liujiang Yu
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2003
Proc. SPIE. 5118, Nanotechnology
KEYWORDS: Fabrication, Carbon, Optical lithography, Etching, Ions, Silicon, Raman spectroscopy, Silicon films, Wet etching, Reactive ion etching

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