Lixiang Wu
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 28, 2016
Proc. SPIE. 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Lithium, Etching, Quartz, Chemical species, Sputter deposition, Ions, Photoresist materials, Monte Carlo methods, Ion beams, Diffraction gratings

PROCEEDINGS ARTICLE | March 13, 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Optical components, Etching, Ions, Ion beams, Raster graphics, Synchrotron radiation, Algorithm development, Vacuum ultraviolet, Diffraction gratings, Synchrotron technology

PROCEEDINGS ARTICLE | August 28, 2014
Proc. SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI
KEYWORDS: Fabrication, Lithography, Potassium, Etching, Silicon, Photoresist materials, Aluminum, Optical alignment, Semiconducting wafers, Anisotropic etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top