Mr. Lloyd C. Litt
SMTS Reticle Strategy at
SPIE Involvement:
Conference Program Committee | Author
Publications (53)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Analytics, Lithography, Reticles, Metrology, Etching, Process control, Photomasks, Critical dimension metrology, OLE for process control

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Reticles, Modulation, Metals, Image processing, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 29, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Metrology, Calibration, Image processing, Scanning electron microscopy, Printing, Photomasks, Optical proximity correction, Feedback loops, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 17, 2014
Proc. SPIE. 9231, 30th European Mask and Lithography Conference
KEYWORDS: Lithography, Reticles, Optical lithography, Custom fabrication, Inspection, Photomasks, Optical proximity correction, Mask making, Semiconducting wafers, Lawrencium

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Wafer-level optics, Reticles, Metrology, Metals, Scanners, Inspection, Scanning electron microscopy, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Data modeling, Scanners, 3D modeling, Photomasks, Optical proximity correction, 3D scanning, Semiconducting wafers, Optics manufacturing, Performance modeling, Binary data

Showing 5 of 53 publications
Conference Committee Involvement (6)
Photomask Technology
11 September 2017 | Monterey, California, United States
Alternative Lithographic Technologies V
25 February 2013 | San Jose, California, United States
Alternative Lithographic Technologies IV
13 February 2012 | San Jose, California, United States
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Showing 5 of 6 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top