Loïc E. Hans
at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Carbon, Titanium, Optical lithography, Etching, Glasses, Photoresist materials, Photomasks, Aluminum, Reactive ion etching, Semiconducting wafers

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