Lois Fernandez Miguez
at Eindhoven University of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 124980E (2023) https://doi.org/10.1117/12.2658404
KEYWORDS: Electrons, Scattering, Photoresist materials, Photons, Quantum processes, Monte Carlo methods, Molecules, Extreme ultraviolet lithography, Computer simulations

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