Dr. Long Cheng
at Institute of Automation
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, FT-IR spectroscopy, Quartz, Polymers, Mercury, Lamps, Photoresist materials, Polymerization, Polymer thin films, Absorption

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