Longjiang Chen
at Zhejiang Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 November 2010
Proc. SPIE. 7855, Optical Metrology and Inspection for Industrial Applications
KEYWORDS: Confocal microscopy, Beam splitters, Light sources, Ferroelectric materials, Sensors, Inspection, Collimation, Profiling, Distance measurement, Objectives

Proceedings Article | 20 November 2009
Proc. SPIE. 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Lithography, Refractive index, Interferometers, Interfaces, Reflectivity, Interferometry, Wavefronts, Optical testing, Photoresist materials, CCD image sensors

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