Louis Jang
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Optical lithography, Statistical analysis, Data modeling, Scanners, Distortion, Process control, Semiconducting wafers, Statistical modeling, Overlay metrology

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Antireflective coatings, Ions, Silicon, Reflectivity, Scanning electron microscopy, Silicon films, Transmittance, Photoresist processing, Semiconducting wafers

Proceedings Article | 12 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Tunable lasers, Coherence (optics), Imaging systems, Spectroscopy, Laser scanners, Laser stabilization, 3D scanning, Critical dimension metrology, Semiconducting wafers

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