Dr. Lu Chen
at Applied Materials Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Lithography, Temperature metrology, Optical lithography, Resolution enhancement technologies, Industrial chemicals, Chemical reactions, Photoresist materials, Extreme ultraviolet lithography

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Particles, Lithography, Scanners, Scanning electron microscopy, Wafer testing, Lutetium, Metrology, Silicon films

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