Dr. Lu Liu Profile

Dr. Lu Liu

at Beijing Normal Univ.

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Publications (2)

Proceedings Article | 30 March 2010 Paper

The imaging study of a novel photopolymer used in I-line negative-tone resist

Lu Liu, Yingquan Zou

Proceedings Volume 7639, 76391B (2010) https://doi.org/10.1117/12.846435

KEYWORDS: Polymers, Polymerization, Lithography, FT-IR spectroscopy, Absorption, Photoresist materials, Ultraviolet radiation, Absorbance, Telecommunications, Etching

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Proceedings Article | 11 December 2009 Paper

The synthesis and imaging study of a series of novel photoactive polymers with diazoketo groups in their side chains

Lu Liu, Yingquan Zou, Yuchun Yang, Yong Huang, Qisheng Liu, Huinan Niu

Proceedings Volume 7520, 75201R (2009) https://doi.org/10.1117/12.839549

KEYWORDS: Polymers, Absorption, Polymerization, Etching, Solids, Lithography, Chlorine, FT-IR spectroscopy, Deep ultraviolet, Molecules

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