Dr. Lu Liu
at Beijing Normal Univ.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, FT-IR spectroscopy, Etching, Polymers, Ultraviolet radiation, Photoresist materials, Telecommunications, Polymerization, Absorbance, Absorption

Proceedings Article | 11 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, FT-IR spectroscopy, Deep ultraviolet, Etching, Polymers, Molecules, Solids, Polymerization, Chlorine, Absorption

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