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Lu Wang
at Heilongjiang Univ
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Publications (1)
Proceedings Article | 24 August 2009 Paper
Study on fabrication of silicon microcantilevers for the pulse sensor by a laser etching technology
Lu Wang, Dian-zhong Wen
Proceedings Volume 7381, 73811S (2009) https://doi.org/10.1117/12.834551
KEYWORDS: Silicon, Etching, Semiconductor lasers, Sensors, Laser applications, Semiconducting wafers, Resistance, Pulsed laser operation, Micromachining, Microelectromechanical systems
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