Lu Wang
at Heilongjiang Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 August 2009
Proc. SPIE. 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Silicon, Laser applications, Resistance, Semiconductor lasers, Micromachining, Semiconducting wafers, Pulsed laser operation

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