Dr. Luc Froehly
Senior Researcher at FEMTO-ST
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 28 April 2017
Proc. SPIE. 10120, Complex Light and Optical Forces XI
KEYWORDS: Laser processing, Materials processing, Laser beam propagation, Process control, Ultrafast lasers, Bessel beams, Light-matter interactions, Nondiffracting beams, Wave propagation interference, Beam controllers

Proceedings Article | 27 April 2016
Proc. SPIE. 9888, Micro-Optics 2016
KEYWORDS: Optical components, Polishing, Glasses, Micro optics, Microlens, Optical aberrations, Semiconducting wafers

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Phase shifting, Mirau interferometers, Optical coherence tomography, Etching, Silicon, Interferometry, Microactuators, Microopto electromechanical systems, Micromirrors, Photomasks, Semiconducting wafers, Phase shifts

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Mirrors, Beam splitters, Microsystems, Optical coherence tomography, Skin, Silicon, Microopto electromechanical systems, Semiconducting wafers

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Optical components, Microscopes, Metrology, Digital holography, Optical properties, Imaging systems, Interferometry, Wavefronts, Phase retrieval, Wave propagation, Objectives, Micro optics, Microlens, Optical aberrations

Showing 5 of 14 publications
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