Dr. Luc Girard Profile

Dr. Luc Girard

Fellow, Chief EUV Optical Engineer at Zygo Corporation

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Publications (8)

Proceedings Article | 18 March 2016 Paper

Current development status of HSFET (High NA Small Field Exposure Tool) in EIDEC

Satoshi Tanaka, Shunko Magoshi, Hidemi Kawai, Soichi Inoue, Wylie Rosenthal, Luc Girard, Lou Marchetti, Bob Kestner, John Kincade

Proceedings Volume 9776, 97761N (2016) https://doi.org/10.1117/12.2219368

KEYWORDS: Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Process control, Photomasks, Lithography, Optical design, Projection systems, Polarization, Mirrors, Reticles, Semiconducting wafers

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Proceedings Article | 11 October 2015 Paper

Fabrication of EUVL micro-field exposure tools with 0.5 NA

Luc Girard, Lou Marchetti, Mark Bremer, Jim Kennon, Bob Kestner, Sam Hardy

Proceedings Volume 9633, 96330V (2015) https://doi.org/10.1117/12.2203138

KEYWORDS: Wavefronts, Mirrors, Optical fabrication, Optical testing, Optical alignment, Extreme ultraviolet, Reticles, Metrology, Optical coatings, Extreme ultraviolet lithography

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Proceedings Article | 17 April 2014 Paper

Projection optics for EUVL micro-field exposure tools with 0.5 NA

Holger Glatzel, Dominic Ashworth, Dan Bajuk, Matt Bjork, Mark Bremer, Mark Cordier, Kevin Cummings, Luc Girard, Michael Goldstein, Eric Gullikson, Samuel Hardy, Russ Hudyma, James Kennon, Robert Kestner, Lou Marchetti, Keyvan Nouri, Patrick Naulleau, Daniel Pierce, Regina Soufli, Eberhard Spiller, Yogesh Verma

Proceedings Volume 9048, 90481K (2014) https://doi.org/10.1117/12.2048643

KEYWORDS: Mirrors, Metrology, Wavefronts, Projection systems, Aspheric lenses, Extreme ultraviolet, Extreme ultraviolet lithography, Optical coatings, Lithography, Optical fabrication

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Proceedings Article | 17 April 2014 Paper

Update on the SEMATECH 0.5 NA Extreme-Ultraviolet Lithography (EUVL) Microfield Exposure Tool (MET)

Kevin Cummings, Dominic Ashworth, Mark Bremer, Rodney Chin, Yu-Jen Fan, Luc Girard, Holger Glatzel, Michael Goldstein, Eric Gullikson, Jim Kennon, Bob Kestner, Lou Marchetti, Patrick Naulleau, Regina Soufli, Johannes Bauer, Markus Mengel, Joachim Welker, Michael Grupp, Erik Sohmen, Stefan Wurm

Proceedings Volume 9048, 90481M (2014) https://doi.org/10.1117/12.2046380

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Projection systems, Lithography, Reticles, Cameras, Artificial intelligence, Optical lithography, Wavefronts, Sensors

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Proceedings Article | 1 April 2013 Paper

Projection optics for extreme ultraviolet lithography (EUVL) micro-field exposure tools (METs) with a numerical aperture of 0.5

Holger Glatzel, Dominic Ashworth, Mark Bremer, Rodney Chin, Kevin Cummings, Luc Girard, Michael Goldstein, Eric Gullikson, Russ Hudyma, Jim Kennon, Bob Kestner, Lou Marchetti, Patrick Naulleau, Regina Soufli, Eberhard Spiller

Proceedings Volume 8679, 867917 (2013) https://doi.org/10.1117/12.2012698

KEYWORDS: Mirrors, Multilayers, Wavefronts, Extreme ultraviolet lithography, Aspheric lenses, Metrology, Extreme ultraviolet, Projection systems, Lithography, Optical testing

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Proceedings Article | 21 March 1997 Paper

Liquid mirror telescopes: a progress report

Ermanno Borra, Marc Ferrari, Luc Girard, Gilberto Moretto, Gregoire Tremblay, Gerard Lemaitre

Proceedings Volume 2871, (1997) https://doi.org/10.1117/12.269054

KEYWORDS: Mirrors, Liquids, Telescopes, Mercury, Interferometry, Light scattering, Charge-coupled devices, Lenses, Point spread functions, Optical design

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Proceedings Article | 1 June 1994 Paper

Liquid mirror telescopes: a progress report

Ermanno Borra, Luc Girard, Gilberto Moretto, Min Wang, Gregoire Tremblay, Gerard Lemaitre

Proceedings Volume 2199, (1994) https://doi.org/10.1117/12.176218

KEYWORDS: Mirrors, Liquids, Monochromatic aberrations, Telescopes, Wavefronts, Gallium, Astronomy, Interferometry, Mercury, Spectroscopy

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Proceedings Article | 1 July 1990 Paper

Liquid mirrors: a progress report

Ermanno Borra, Robert Content, Mark Drinkwater, Luc Girard, Louise Tremblay, Stan Szapiel, Brad Gibson, Paul Hickson, Christopher Morbey

Proceedings Volume 1236, (1990) https://doi.org/10.1117/12.19199

KEYWORDS: Mirrors, Liquids, Mercury, Point spread functions, Astronomy, Optical telescopes, Charge-coupled devices, Observatories, Telescopes, Sensors

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Showing 5 of 8 publications

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