Luc Van Kessel
at Technische Univ Delft
SPIE Involvement:
Publications (5)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295303 (2024)
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Reticles, Scanners, Extreme ultraviolet lithography, Atomic force microscopy, 3D mask effects, Monte Carlo methods, Metrology, Simulations

SPIE Journal Paper | 12 September 2020
Luc Van Kessel, Thomas Huisman, Cornelis Hagen
JM3, Vol. 19, Issue 03, 034002, (September 2020)

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113250Z (2020)
KEYWORDS: Scanning electron microscopy, Line edge roughness, Monte Carlo methods, 3D modeling, Scattering, Electron beams, Metrology

SPIE Journal Paper | 30 October 2019
Luc Van Kessel, Cornelis Hagen, Pieter Kruit
JM3, Vol. 18, Issue 04, 044002, (October 2019)
KEYWORDS: Electrons, Scanning electron microscopy, Surface plasmons, Scattering, Monte Carlo methods, Interfaces, Aluminum, Plasmons, Selenium, Dielectrics

Proceedings Article | 26 March 2019 Presentation + Paper
L. van Kessel, C. Hagen, P. Kruit
Proceedings Volume 10959, 109590V (2019)
KEYWORDS: Scanning electron microscopy, Scattering, Surface plasmons, Monte Carlo methods, Interfaces, Aluminum, Plasmons, Dielectrics, Silicon

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