Dr. Luciana Meli
Research Engineer at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Conference Program Committee | Author
Publications (51)

Proceedings Article | 28 November 2023 Presentation + Paper
Proceedings Volume PC12750, PC127500G (2023) https://doi.org/10.1117/12.2687901
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Lithography, Semiconductors, Integrated circuits, Industry, Fiber optic illuminators, Fabrication, Etching

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 1249821 (2023) https://doi.org/10.1117/12.2657290
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Light sources and illumination, Etching, Coating thickness, Optical lithography, Printing, Lithography

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 1249822 (2023) https://doi.org/10.1117/12.2658880
KEYWORDS: Extreme ultraviolet, Metal oxides, Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Inspection, Interfaces, Etching, Plasma etching, Photoresist processing

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12496, 124960V (2023) https://doi.org/10.1117/12.2657650
KEYWORDS: Metrology, Scanning electron microscopy, Electron microscopes, Extreme ultraviolet, Time metrology, Stochastic processes, Statistical analysis, Critical dimension metrology, Inspection

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940U (2023) https://doi.org/10.1117/12.2657634
KEYWORDS: SRAF, Light sources and illumination, Printing, Electroluminescence, Line edge roughness, Extreme ultraviolet, Nickel, 3D mask effects, Semiconducting wafers, Finite element methods

Showing 5 of 51 publications
Conference Committee Involvement (5)
Optical and EUV Nanolithography XXXVII
26 February 2024 | San Jose, California, United States
Optical and EUV Nanolithography XXXVI
27 February 2023 | San Jose, California, United States
Optical and EUV Nanolithography XXXV
25 April 2022 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography XII
22 February 2021 | Online Only, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
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