Dr. Lucien Penlap Woguia Profile

Dr. Lucien Penlap Woguia

at CEA-LETI

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Proceedings Article | 22 February 2021 Poster + Paper

Data fusion by artificial neural network for hybrid metrology development

L. Penlap Woguia, J. Reche, M. Besacier, P. Gergaud, G. Rademaker

Proceedings Volume 11611, 116112L (2021) https://doi.org/10.1117/12.2583590

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Hybrid metrology is a promising approach to access to the critical dimensions of line gratings with precisions. The objective of this work is about using artificial intelligence (AI), mainly artificial neural network (ANN) to improve metrology at nanoscale characterization by hybridization of several techniques. Namely, optical critical dimension (OCD) or scatterometry, CD–Scanning electron microscopy (CDSEM), CD–Atomic force microscopy (CDAFM) and CD–Small angle x-rays scattering (CDSAXS). With virtual data of tabular–type generated by modelling, the ANN is able to predict the geometrical parameters compared to true measured values with high accuracies and detect irregularities in input data.

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