Mr. Ludolf Herbst Profile

Ludolf Herbst

Product Manager at Coherent LaserSystems GmbH & Co KG

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Author

Publications (11)

Proceedings Article | 8 February 2012 Paper

Average power scaling of UV excimer lasers drives flat panel display and lidar applications

Ralph Delmdahl, Ludolf Herbst, Rainer Paetzel

Proceedings Volume 8238, 82380A (2012) https://doi.org/10.1117/12.906687

KEYWORDS: Excimer lasers, Ultraviolet radiation, LIDAR, Laser applications, Raman spectroscopy, Annealing, Flat panel displays, Backscatter, Amorphous silicon, High power lasers

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Proceedings Article | 22 February 2011 Paper

Novel 1.2kW UV laser system for micro fabrication and annealing

Ludolf Herbst, Rainer Paetzel, Kai Schmidt

Proceedings Volume 7920, 79200Z (2011) https://doi.org/10.1117/12.874977

KEYWORDS: Excimer lasers, Ultraviolet radiation, Manufacturing, Oscillators, Laser systems engineering, Annealing, Laser development, High power lasers, Pulsed laser operation, Solid state lasers

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Proceedings Article | 22 April 2009 Paper

Advances in industrial high-power excimer laser technology

Ludolf Herbst, Ingo Klaft, Andreas Targsdorf, Timur Misyuryaev, Igor Bragin, Kai Schmidt, Wolfgang Zschocke

Proceedings Volume 7131, 71311B (2009) https://doi.org/10.1117/12.816554

KEYWORDS: Pulsed laser operation, Gas lasers, Excimer lasers, Laser applications, Laser stabilization, High power lasers, Laser development, Pulsed power, Laser systems engineering, Laser energy

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Proceedings Article | 25 February 2009 Paper

Micro-scale large-area UV laser processing

Ludolf Herbst, Jan Brune

Proceedings Volume 7202, 72020M (2009) https://doi.org/10.1117/12.807828

KEYWORDS: Excimer lasers, Ultraviolet radiation, Laser processing, Metals, Pulsed laser operation, Laser liftoff, Polymers, Laser applications, Annealing, Optical lithography

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Proceedings Article | 20 March 2007 Paper

New high repetition rate, high energy 308 nm excimer laser for material processing

Kai Schmidt, Ingo Klaft, Ludolf Herbst, Igor Bragin, Hans-Stephan Albrecht

Proceedings Volume 6459, 64590I (2007) https://doi.org/10.1117/12.717842

KEYWORDS: Excimer lasers, Pulsed laser operation, Laser development, Gas lasers, Laser stabilization, High power lasers, Materials processing, Excimers, Laser ablation, Ultraviolet radiation

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Proceedings Article | 1 March 2006 Paper

Laser annealing of LTPS

Frank Simon, Ludolf Herbst, Rainer Paetzel

Proceedings Volume 6106, 61060A (2006) https://doi.org/10.1117/12.659082

KEYWORDS: Crystals, Excimer lasers, Annealing, Amorphous silicon, Glasses, Laser sintering, Laser crystals, LCDs, Diode pumped solid state lasers, Silicon films

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Proceedings Article | 1 March 2006 Paper

High power excimer laser micromachining

Ludolf Herbst, Rainer Paetzel

Proceedings Volume 6106, 610606 (2006) https://doi.org/10.1117/12.655221

KEYWORDS: Excimer lasers, Micromachining, Ultraviolet radiation, Optical lithography, Excimers, Manufacturing, High power lasers, Laser ablation, Photomasks, Laser systems engineering

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Proceedings Article | 17 June 2003 Paper

High-peak power solid state laser for micromachining of hard materials

Gregory Ray, John Quitter, Sergei Govorkov, Thomas Kuntze, Alexander Wiessner, Mike Heglin, Ludolf Herbst

Proceedings Volume 4968, (2003) https://doi.org/10.1117/12.478958

KEYWORDS: Silicon, Micromachining, Diode pumped solid state lasers, Diamond, Laser drilling, Solid state lasers, Manufacturing, Nd:YAG lasers, Head, Pulsed laser operation

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Proceedings Article | 5 June 2003 Paper

High-repetition-rate excimer laser for micromachining

Thomas Wenzel, Ulrich Rebhan, Ingo Klaft, Ludolf Herbst

Proceedings Volume 4971, (2003) https://doi.org/10.1117/12.479174

KEYWORDS: Excimer lasers, Photomasks, Ultraviolet radiation, Micromachining, Spatial coherence, Plasma display panels, Excimers, Laser stabilization, Near field optics, Gas lasers

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Proceedings Article | 16 May 2003 Paper

300 W XeCl excimer laser annealing and sequential lateral solidification in low temperature poly-silicon technology

Rustem Osmanow, Ulrich Rebhan, Ludolf Herbst, Hans-Juergen Kahlert, Burkhard Fechner

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.476825

KEYWORDS: Excimer lasers, Annealing, High power lasers, Gas lasers, LCDs, Solids, Laser applications, Pulsed laser operation, Laser sintering, Silicon

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Proceedings Article | 15 April 2003 Paper

Excimer laser application: writing of fiber Bragg gratings

Ludolf Herbst, Sergei Govorkov

Proceedings Volume 4941, (2003) https://doi.org/10.1117/12.468392

KEYWORDS: Excimer lasers, Fiber Bragg gratings, Ultraviolet radiation, Resonators, Manufacturing, Laser sources, Spatial coherence, Continuous wave operation, Optics manufacturing, Laser development

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Showing 5 of 11 publications

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