Dr. Ludovic Lattard
at CEA-LETI
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 27 April 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Wafer-level optics, Lithography, Electron beam lithography, Electron beams, Switching, Lithographic illumination, Photomasks, Integrated optics, Optical alignment, Semiconducting wafers

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Etching, Silicon, Scanning electron microscopy, Line width roughness, Neodymium, Semiconducting wafers, Surface conduction electron emitter displays

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Metrology, Logic, Optical lithography, Data modeling, Calibration, Manufacturing, Electroluminescence, Software development, Optical simulations, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Electronic design automation

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Point spread functions, Etching, Silicon, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Information technology, Critical dimension metrology

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Electron beam lithography, Etching, Metals, Silicon, Resistance, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, System on a chip

Showing 5 of 9 publications
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