Ludovico Cademartiri
at Iowa State Univ of Science and Technology
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 6 September 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Plasma, Lithography, Nanoparticles, Nanocrystals, Photomasks, Plasma etching, Polymers, Etching, Copper, Hybrid fiber optics

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Nanoparticles, Etching, Photomasks, Plasma etching, Nanocrystals, Zirconium dioxide, Nanolithography, Plasma

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