Dr. Ludwig van Loyen
at Fraunhofer IWS Dresden
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Mirrors, Calibration, Spectroscopy, Laser energy, Reflectometry, Extreme ultraviolet, Charge-coupled devices, Pulsed laser operation, Power meters, Plasma

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Multilayers, Crystals, Interfaces, Silicon, Silver, Reflectivity, Reflectometry, Extreme ultraviolet, Molybdenum, Ruthenium

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Mirrors, Beam splitters, Sensors, Reflectivity, Reflectometry, Extreme ultraviolet, Monochromators, Signal detection, Pulsed laser operation, EUV optics

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