Luis E. Gutierrez-Rivera
at Univ Estadual de Campinas
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7204, Micromachining and Microfabrication Process Technology XIV
KEYWORDS: Lithography, Optical lithography, Interferometers, Polymers, Glasses, Ultraviolet radiation, Particles, Silicon, Scanning electron microscopy, Photoresist materials

PROCEEDINGS ARTICLE | December 29, 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Lithography, Optical lithography, Glasses, Particles, Nickel, Silicon, Photography, Photoresist materials, Photomasks, Photoresist developing

PROCEEDINGS ARTICLE | October 21, 2004
Proc. SPIE. 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications
KEYWORDS: Thin films, Lithography, Holography, Nickel, Argon ion lasers, Laser applications, Physics, Photoresist materials, Laser optics, Photoresist developing

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