Luis E. Gutierrez-Rivera
at Univ of Campinas
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 February 2009 Paper
Proceedings Volume 7204, 72040N (2009) https://doi.org/10.1117/12.808601
KEYWORDS: Lithography, Polymers, Ultraviolet radiation, Scanning electron microscopy, Silicon, Glasses, Particles, Photoresist materials, Optical lithography, Interferometers

Proceedings Article | 29 December 2005 Paper
Luis Gutierrez-Rivera, Edson de Carvalho, Maria da Silva, Lucila Cescato
Proceedings Volume 6037, 603710 (2005) https://doi.org/10.1117/12.637935
KEYWORDS: Nickel, Photoresist materials, Lithography, Particles, Photomasks, Silicon, Photoresist developing, Photography, Glasses, Optical lithography

Proceedings Article | 21 October 2004 Paper
Proceedings Volume 5622, (2004) https://doi.org/10.1117/12.592175
KEYWORDS: Holography, Photoresist materials, Nickel, Lithography, Photoresist developing, Physics, Laser optics, Laser applications, Argon ion lasers, Thin films

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