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Luis Marques
at Univ do Minho
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 26 July 2011 Paper
Optical properties of AlNxOy thin films deposited by DC magnetron sputtering
J. Borges, E. Alves, F. Vaz, L. Marques
Proceedings Volume 8001, 80010F (2011) https://doi.org/10.1117/12.892038
KEYWORDS: Aluminum, Reflectivity, Optical properties, Thin films, Sputter deposition, Coating, Aluminum nitride, Thin film deposition, Chemical elements, Transmittance
Conference Committee Involvement (1)
Third International Conference on Applications of Optics and Photonics
8 May 2017 | Faro, Portugal
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