Dr. Luisa D. Bozano
Director Patterning at Applied Materials Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (18)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570X (2024) https://doi.org/10.1117/12.3010203
KEYWORDS: Lithography, Packaging, Polyimides, Materials properties, Electrical properties, Dielectrics, Image processing, Film thickness, Chemical mechanical planarization, Advanced packaging

Proceedings Article | 4 March 2019 Paper
Proceedings Volume 10881, 1088109 (2019) https://doi.org/10.1117/12.2509168
KEYWORDS: Video, Chemical analysis, Machine vision, Computer vision technology, Microscopes, Computing systems, Microorganisms, Visualization, Imaging systems, Machine learning

Proceedings Article | 17 October 2014 Paper
T. Faure, A. Zweber, L. Bozano, M. Sanchez, R. Sooriyakumaran, L. Sundberg, Y. Sakamoto, S. Nash, M. Kagawa, T. Isogawa, T. Senna, M. Tanabe, T. Komizo, I. Yoshida, K. Masunaga, S. Watanabe, Y. Kawai, J. Malenfant, R. Bowley
Proceedings Volume 9235, 92350P (2014) https://doi.org/10.1117/12.2069031
KEYWORDS: Etching, Opacity, Switching, SRAF, Dry etching, Critical dimension metrology, Logic, Scanning electron microscopy, Manufacturing, Image resolution

Proceedings Article | 27 March 2014 Paper
Proceedings Volume 9051, 90510S (2014) https://doi.org/10.1117/12.2046762
KEYWORDS: Image processing, Ions, Photoresist processing, Semiconducting wafers, Polymers, Lithium, Standards development, Lithography, Image quality standards, Reflectivity

Proceedings Article | 27 March 2014 Paper
Kazuhiko Komura, Yoshi Hishiro, Goji Wakamatsu, Yoshio Takimoto, Tomoki Nagai, Tooru Kimura, Yoshikazu Yamaguchi, Tsutomu Shimokawa, Greg Breyta, Noel Arellano, Srinivasan Balakrishnan, Luisa Bozano, Ananthakrishnan Sankaranarayanan, Krishna Bajjuri, Daniel Sanders, Carl Larson, Anuja DeSilva, Martin Glodde
Proceedings Volume 9051, 905115 (2014) https://doi.org/10.1117/12.2046357
KEYWORDS: Fourier transforms, Chemical vapor deposition, Photoresist materials, Resistance, Carbon, Photomasks, Optical lithography, Lithography, Glasses

Showing 5 of 18 publications
Conference Committee Involvement (10)
Advances in Patterning Materials and Processes XLI
26 February 2024 | San Jose, California, United States
Advances in Patterning Materials and Processes XL
27 February 2023 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXII
24 February 2015 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXI
24 February 2014 | San Jose, California, United States
Showing 5 of 10 Conference Committees
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