Prof. Luiz O. S. Ferreira
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

Proceedings Article | 17 November 2008
Proc. SPIE. 7266, Optomechatronic Technologies 2008
KEYWORDS: Actuators, Mirrors, Opto mechatronics, Ions, Manufacturing, Magnetism, Interferometric synthetic aperture radar, Electromagnetism, Mechanical efficiency, Current controlled current source

Proceedings Article | 1 August 2005
Proc. SPIE. 5873, Optical Scanning 2005
KEYWORDS: Actuators, Mirrors, Doppler effect, Scanners, Magnetism, Laser Doppler velocimetry, Finite element methods, Chemical elements, Electromagnetism, Instrument modeling

Proceedings Article | 30 September 2003
Proc. SPIE. 5264, Optomechatronic Systems IV
KEYWORDS: Thin films, Mirrors, Scanners, Silicon, Resistance, Magnetism, Silicon films, Semiconducting wafers, Electromagnetism, Nanolithography

Proceedings Article | 18 October 2002
Proc. SPIE. 4902, Optomechatronic Systems III
KEYWORDS: Gold, Lithography, Mirrors, Scanners, Silicon, Manufacturing, Magnetism, Electroplating, Electromagnetism, Prototyping

Proceedings Article | 20 August 2001
Proc. SPIE. 4343, Emerging Lithographic Technologies V
KEYWORDS: Gold, Lithography, Polymethylmethacrylate, X-rays, Silicon, Photoresist materials, Silicon films, Photomasks, Synchrotrons, X-ray lithography

Conference Committee Involvement (1)
Optomechatronic Systems IV
28 October 2003 | Providence, RI, United States
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