Dr. Lukasz Nieradko
at Wroclawskie Centrum Badan EIT+ sp z o o
SPIE Involvement:
Publications (18)

Proceedings Article | 14 May 2010 Paper
Proceedings Volume 7716, 77161W (2010) https://doi.org/10.1117/12.853836
KEYWORDS: Etching, Silicon, Data modeling, Microfabrication, Finite element methods, Interfaces, Glasses, Wet etching, Process modeling, Diffusion

Proceedings Article | 11 August 2008 Paper
C. Gorecki, K. Krupa, A. Andrei, M. Jozwik, L. Nieradko, P. Delobelle, L. Hirsinger
Proceedings Volume 7064, 706402 (2008) https://doi.org/10.1117/12.796072
KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Microelectromechanical systems, Silicon, Electrodes, Thin films, Actuators, Scanning electron microscopy, Multilayers

SPIE Journal Paper | 1 July 2008
JM3, Vol. 7, Issue 03, 033013, (July 2008) https://doi.org/10.1117/12.10.1117/1.2964288
KEYWORDS: Cesium, Absorption, Silicon, Glasses, Atomic clocks, Semiconducting wafers, Etching, Modulation, Microelectromechanical systems, Chemical species

Proceedings Article | 20 May 2008 Paper
Proceedings Volume 6995, 69950A (2008) https://doi.org/10.1117/12.780791
KEYWORDS: Silicon, Waveguides, Atomic force microscopy, Integrated optics, Oxides, Mirrors, Michelson interferometers, Interferometers, Actuators, Matrices

Proceedings Article | 14 May 2008 Paper
Proceedings Volume 6992, 69920A (2008) https://doi.org/10.1117/12.783093
KEYWORDS: Etching, Silicon, Microlens, Glasses, Anisotropic etching, Semiconducting wafers, Photomasks, Polymers, Isotropic etching, Optical lithography

Showing 5 of 18 publications
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