Dr. Lukasz Urbanski
at
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | September 27, 2013
Proc. SPIE. 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
KEYWORDS: Lithography, Nanostructures, Coherence imaging, Imaging systems, Printing, Photoresist materials, Photomasks, Extreme ultraviolet, X-ray lasers, Nanolithography

PROCEEDINGS ARTICLE | October 5, 2011
Proc. SPIE. 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX
KEYWORDS: Temporal coherence, Mirrors, Interferometers, Argon, Capillaries, Plasmas, Laser applications, Solids, X-ray lasers, Visibility

PROCEEDINGS ARTICLE | October 5, 2011
Proc. SPIE. 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX
KEYWORDS: Nanostructures, Diffraction, Mirrors, Capillaries, Photography, Photoresist materials, Photomasks, Extreme ultraviolet, X-ray lasers, Spherical lenses

PROCEEDINGS ARTICLE | December 15, 2010
Proc. SPIE. 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
KEYWORDS: Microscopes, Diffraction, Holograms, Holography, 3D image reconstruction, Image resolution, Photoresist materials, Photomasks, Extreme ultraviolet, Spatial resolution

PROCEEDINGS ARTICLE | September 29, 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: Lithography, Nanostructures, Coherence imaging, Holography, Capillaries, Interferometry, Printing, Photoresist materials, Photomasks, X-ray lithography

SPIE Journal Paper | April 1, 2009
JM3 Vol. 8 Issue 02
KEYWORDS: Extreme ultraviolet, Interferometry, Lithography, Interferometers, Mirrors, Diffraction gratings, Wavefronts, Extreme ultraviolet lithography, Capillaries, Synchrotrons

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top