Dr. Luke Lin
Assistant Vice President at Hermes-Microvision Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Wafer-level optics, Lithography, Electron beams, Etching, Inspection, Wafer inspection, Thin film coatings, Semiconducting wafers, Wafer testing, Defect inspection

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