Dr. Lun Shi
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 17, 2003
Proc. SPIE. 4984, Micromachining Technology for Micro-Optics and Nano-Optics
KEYWORDS: Diffraction, Mechanics, Interferometers, Sensors, Photography, Physics, Control systems, Atomic force microscopy, Signal detection, Diffraction gratings

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